IEC/TR 63258:2021

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IEC TR 63258:2021 is an International Electrotechnical Commission (IEC) Technical Report that provides a guideline for using ellipsometry to measure the thickness of nanoscale films. It focuses on the practical protocols of ellipsometry, a technique that uses polarized light to characterize thin films. The report is part of the larger field of Nanotechnologies according to the International Organization for Standardization (ISO).